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>化學芯片開封機Elite Etch 7000

化學芯片開封機Elite Etch 7000

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似空科學儀器(上海)有限公司

美國

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產品介紹

RKD公司的Elite Etch是一個自動混酸解封裝置,通過各種先進功能的整合來提高生產力,使用現代化材料和**工業設計。通過提供精確、微等分硝酸、硫酸或混合酸,RKD公司的Elite Etch蝕解封裝設備能夠迅速和便捷地打開*精致的封裝并保證不會損壞樣品。

The first-generation automated mixed acid decapsulator

RKD Elite Etch蝕刻酸解封裝置集成了許多的工程創新。采用優質級碳化硅加工的整體式蝕刻頭組件具有優異的耐酸性,再加上活性氮氣體監測和凈化系統這一整體的設計,降低了開封完成后殘留在蝕刻頭上酸的冒煙情況。選擇單片碳化硅也可以縮短升溫時間。

蝕刻頭使用低熱質量的設計。其他制造商使用高熱質量設計和復雜可互換的組件如可移動的蝕刻頭插入,具有不可靠的性能特點。我們簡單但有效的設計大大減少了蝕刻頭的清洗和周圍堵塞的情況。

設備限制鼻壓頭是手動下壓,是專為大量的使用所設計。鼻壓頭通常縮回,只在安全蓋完全關閉后延伸。RAM的鼻子垂直運動的固定裝置的蝕刻頭從而消除或包或夾具的運動。

RKD Engineering’s Elite Etch incorporates the latest innovations. The etch head is machined from premium grade silicon carbide for its extreme acid and temperature resistance. Coupled with an active nitrogen gas monitoring and purge system, this monolithic design to reduces the fuming of residual acids left on the etch head after each decapsulation process. The silicon carbide etch head enables short heat-up times with high thermal conductivity.

The device hold-down assembly (ram nose) is a pneumatically activated and is designed for a large amount of travel. The ram nose only extends when the safety cover is fully closed to ensure absolute vertical movement. The ram nose secures the sample to the etch head, thus eliminating movement of either the package or its fixturing.

The safety cover is operated manually for safe control of the operation. This guarantees to the operator that the cover has sealed correctly. Acid flow lines and system assemblies are radially symmetrical compression joints which are engineered to eliminate high pressure seal failures.

The Elite Etch is designed to fit comfortably inside of a fume hood while maintaining all necessary safety features. By using a heat exchange system, waste acid is cooled below 90 C to allow the use of a single waste bottle. The Elite Etch uses 3 standard 500 ml bottles which are supplied with the system.

RKD Engineering incorporates double containment for all fluid couplings between the bottle container and the decapsulator. The bottle box assembly and the etcher unit both contain fluid sensors to alert the operator in the event of an acid leak from any of the bottles or internal fittings. The bottle box incorporates a universal pivoting interconnect which allows simple bottle exchanges.

Specifications

Etcher UnitHeight: 300 mm (13 in)
Width: 190 mm (7.5 in)
Depth: 305 mm (12 in)
Bottle AssemblyHeight: 254 mm (10 in)
Width: 280 mm (11 in)
Depth: 127 mm (5 in)
WeightApprox. 16 kg (35 lb)
Power Source90 to 250 VAC, 50 to 60 Hz (4 amp)
Acid temp. range20° to 250° C
Acid temp. set point1° C ± 1% of setting
Etch cavity (up to)22 mm x 22 mm (30 mm diagonal)
Choice of Acidsfuming nitric acids, mixed fuming nitric and sulfuric acids, or fuming/concentrated sulfuric acid
Acid Mix Ratios(nitric to sulfuric ratios) 9:1, 5:1, 4:1, 3:1, 2:1, 1:1
Post Etch Rinse Optionssulfuric acids, fuming nitric acids, mixed acids, or no rinse
Etch Times1 to 1,800 seconds in 1 second increments (1 seconds to 30 minutes) dynamic (real time) adjustments of etch time
Etch Temperature Ranges20° to 90° C (nitric acid), 20° to 250° C (sulfuric acid), 20° to 100° C (mixed acids)
Etchant Volume Selection1 to 6 ml per minute - for all acids & acid mixes
Operator Program Storage100 programs stored to nonvolatile memory

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化學芯片開封機Elite Etch 7000

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